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Comparison of structural, optical and electrical properties of undoped and boron doped ZnO thin films for varying thickness deposited by advanced spray pyrolysis technique at low substrate temperature

S.C.Yadav, M.D.Uplane

Thickness varied thin films of undoped and Boron doped Zinc oxide have been prepared on glass substrates by advanced spray pyrolysis techniques at low substrate temperature (2000C) using different volumes of 0.075M non-aqueous solution of Zinc acetate and boric acid for doping. The structural, optical and electrical properties of undoped zinc oxide (ZnO) thin films of various thicknesses were compared with those of B-doped (BZO) thin films. Transparent, high-quality undoped ZnO and BZO films were deposited successfully using advanced spray pyrolysis technique at low substrate temperature (2000C). The filmswere polycrystalline with a hexagonal structure and a strongly preferred orientation along the c-axis. X-ray diffraction analyses showed that the crystallinity of BZO films were deteriorated by addition of boron as compared to undoped thin films. Moderately high average optical transmittance has been observed for doped films than undoped films in the visible part of the electromagnetic spectrum. Blue shift in optical band gap is observed due to doping. Enhanced electric conductivity is observed for BZO thin filmas compared to undoped films of different thickness.