抽象的な

Influence of porosity of epitaxial layer on quantity of radiation defects generated during radiation processing in amultilayer structure

E.L.Pankratov, E.A.Bulaeva

In this paper we consider redistribution of radiation defects, which were generated during radiation processing, in a multilayer structure with porous epitaxial layer. It has been shown, that porosity of epitaxial layer gives a possibility to decrease quantity of radiation defects.