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The Effect of Different Compositions to Substructure and Dielectric Properties of Ba1-xSrXTiO3 Thin Films Modified Using Sol-Gel Process

Rahmi Dewi

Thin films perovskite Barium Strontium Titanate Ba (1-x) SrxTiO3 (BST) for x=0.1; 0.2 and 0.3 structure type is a hopeful microelectronic devices that can be structured with semiconductor technology. In this research different composition these thin films prepared using sol-gel process. The perovskite structure of these materials can be obtained by controlling the substrate temperature. The samples were annealed at 700°C for 1 h in air. Microstructure and dielectric properties studies show that Sr improve as the compositions increase. All the films have a grain size in nanometers. The average grain size and cross-section of the film increases due to an increase in the composition Sr. The values of the dielectric constant of the film is also increased due to an increase in average grain size. The results showed the microstructure and dielectric properties depending on the composition.